Inventor
HU DA
CN6 patents
⚠️ This page may combine multiple inventors who share the name “HU DA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BEIJING VOYAGER TECH CO LTD
2 patentsUNIV GUANGDONG TECHNOLOGY
2 patentsUS12083647B1Sep 10, 2024
Magnetorheological-elastomer polishing pad for chemical mechanical polishing of semiconductor wafer, preparation method and application thereof
UNIV GUANGDONG TECHNOLOGY0 citations40
US12311497B1May 27, 2025
Method for chemical mechanical polishing of a SiC wafer based on a magnetorheological elastic metal contact corrosion polishing pad
UNIV GUANGDONG TECHNOLOGY0 citations38