Inventor

PORTER CHRISTINA LYNN

NL2 patents

Patents

2 patents

US12044951B2Jul 23, 2024

Illumination source and associated metrology apparatus

ASML NETHERLANDS BV0 citations54

US12474267B2Nov 18, 2025

Wavefront metrology sensor and mask therefor, method for optimizing a mask and associated apparatuses

ASML NETHERLANDS BV0 citations52