Inventor

KANARIK KEREN JACOBS

US27 patents

⚠️ This page may combine multiple inventors who share the name “KANARIK KEREN JACOBS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KANARIK KEREN JACOBS

LAM RES CORP

Integrating atomic scale processes: ALD (atomic layer deposition) and ALE (atomic layer etch)

Integrating atomic scale processes: ALD (atomic layer deposition) and ALE (atomic layer etch)

Designer atomic layer etching

Designer atomic layer etching

Atomic layer etching of tantalum

Integrating atomic scale processes: ALD (atomic layer deposition) and ale (atomic layer etch)

Atomic layer etching of tungsten and other metals

Atomic layer etching of tungsten for enhanced tungsten deposition fill

Atomic layer etching for enhanced bottom-up feature fill

Atomic layer etching of GaN and other III-V materials

Designer atomic layer etching

High energy atomic layer etching

Atomic layer etch of tungsten for enhanced tungsten deposition fill

Integrating atomic scale processes: ALD (atomic layer deposition) and ALE (atomic layer etch)

ALE smoothness: in and outside semiconductor industry

Atomic layer etching 3D structures: Si and SiGe and Ge smoothness on horizontal and vertical surfaces

Ale smoothness: in and outside semiconductor industry

Atomic layer etching and smoothing of refractory metals and other high surface binding energy materials

Inert-dominant pulsing in plasma processing systems

Photoresist conditioning with hydrogen ramping

Mixed mode pulsing etching in plasma processing systems

Inert-dominant pulsing in plasma processing systems

Mixed mode pulsing etching in plasma processing systems

KANARIK KEREN JACOBS

Mixed mode pulsing etching in plasma processing systems

Inert-dominant pulsing in plasma processing systems

Etch tool process indicator method and apparatus

Etch tool process indicator method and apparatus