Inventor

FURUYA SHIGEYUKI

JP2 patents

⚠️ This page may combine multiple inventors who share the name “FURUYA SHIGEYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SANYO ELECTRIC CO

1 patent

US6861372B2Mar 1, 2005

Semiconductor device manufacturing method

SANYO ELECTRIC CO6 citations56

EBARA CORP

1 patent

US11633828B2Apr 25, 2023

Substrate polishing system, substrate polishing method and substrate polishing apparatus

EBARA CORP0 citations49