Inventor
LIM CHIN TEONG
US12 patents
⚠️ This page may combine multiple inventors who share the name “LIM CHIN TEONG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
GLOBALFOUNDRIES INC
11 patentsUS9817927B2Nov 14, 2017
Hard mask etch and dielectric etch aware overlap for via and metal layers
GLOBALFOUNDRIES INC2 citations68
US9329471B1May 3, 2016
Achieving a critical dimension target based on resist characteristics
GLOBALFOUNDRIES INC2 citations62
US10002827B2Jun 19, 2018
Method for selective re-routing of selected areas in a target layer and in adjacent interconnecting layers of an IC device
GLOBALFOUNDRIES INC1 citations51
US9672313B2Jun 6, 2017
Method for selective re-routing of selected areas in a target layer and in adjacent interconnecting layers of an IC device
GLOBALFOUNDRIES INC0 citations51
US9606432B2Mar 28, 2017
Alternating space decomposition in circuit structure fabrication
GLOBALFOUNDRIES INC1 citations51
US9817940B2Nov 14, 2017
Method wherein test cells and dummy cells are included into a layout of an integrated circuit
GLOBALFOUNDRIES INC0 citations49
US9672312B2Jun 6, 2017
Method wherein test cells and dummy cells are included into a layout of an integrated circuit
GLOBALFOUNDRIES INC0 citations49
US9535319B2Jan 3, 2017
Reticle, system comprising a plurality of reticles and method for the formation thereof
GLOBALFOUNDRIES INC1 citations49
US9250538B2Feb 2, 2016
Efficient optical proximity correction repair flow method and apparatus
GLOBALFOUNDRIES INC1 citations49
US9645486B2May 9, 2017
Multiple threshold convergent OPC model
GLOBALFOUNDRIES INC0 citations40
US9384318B2Jul 5, 2016
Mask error compensation by optical modeling calibration
GLOBALFOUNDRIES INC0 citations40