Inventor
KE KUANG-HAN
US5 patents
Patents
5 patentsUS6284093B1Sep 4, 2001
Shield or ring surrounding semiconductor workpiece in plasma chamber
APPLIED MATERIALS INC133 citations98
US6113731ASep 5, 2000
Magnetically-enhanced plasma chamber with non-uniform magnetic field
APPLIED MATERIALS INC152 citations96
US6689249B2Feb 10, 2004
Shield or ring surrounding semiconductor workpiece in plasma chamber
APPLIED MATERIALS INC48 citations95
US5740009AApr 14, 1998
Apparatus for improving wafer and chuck edge protection
APPLIED MATERIALS INC117 citations95
US5989349ANov 23, 1999
Diagnostic pedestal assembly for a semiconductor wafer processing system
APPLIED MATERIALS INC36 citations91