Inventor
ZAWALSKI WADE
US3 patents
Patents
3 patentsUS6558564B1May 6, 2003
Plasma energy control by inducing plasma instability
APPLIED MATERIALS INC171 citations97
US6352049B1Mar 5, 2002
Plasma assisted processing chamber with separate control of species density
APPLIED MATERIALS INC498 citations96
US6566272B2May 20, 2003
Method for providing pulsed plasma during a portion of a semiconductor wafer process
APPLIED MATERIALS INC14 citations83