Inventor · disambiguated record
Russell H. Arndt
Also filed as: AKATSU HIROYUKI · ARNDT RUSSELL · ARNDT RUSSELL H · ARNDT RUSSELL HERBERT
18 granted patents·1 pending application·97 citations·filing 1996–2016
93Inventor score
Top patents by PatentIndex Score
19 records- 0191US9496371B1Channel protection during fin fabricationIBM·Filed 2015·Granted Nov 15, 2016·7 cites·20 claims
- 0278US8298435B2Selective etching bath methodsARNDT RUSSELL HERBERT·Filed 2007·Granted Oct 30, 2012·6 cites·8 claims
- 0375US9177822B2Selective etching bath methodsARNDT RUSSELL HERBERT·Filed 2012·Granted Nov 3, 2015·3 cites·20 claims
- 0472US6475893B2Method for improved fabrication of salicide structuresIBM·Filed 2001·Granted Nov 5, 2002·16 cites·26 claims
- 0571US6354309B1Process for treating a semiconductor substrateIBM·Filed 2000·Granted Mar 12, 2002·13 cites·14 claims
- 0667US10074562B2Self aligned contact structureIBM·Filed 2016·Granted Sep 11, 2018·1 cites·8 claims
- 0767US7890202B2Method for creating wafer batches in an automated batch process toolIBM·Filed 2007·Granted Feb 15, 2011·4 cites·30 claims
- 0866US9406683B2Wet bottling process for small diameter deep trench capacitorsIBM·Filed 2014·Granted Aug 2, 2016·1 cites·20 claims
- 0966US9005464B2Tool for manufacturing semiconductor structures and method of useARNDT RUSSELL H·Filed 2011·Granted Apr 14, 2015·3 cites·20 claims
- 1058US6565666B1Capillary dry process and apparatusIBM·Filed 2000·Granted May 20, 2003·6 cites·11 claims
- 1155US9252053B2Self-aligned contact structureIBM·Filed 2014·Granted Feb 2, 2016·0 cites·21 claims
- 1254US6060388AConductors for microelectronic circuits and method of manufactureIBM·Filed 1997·Granted May 9, 2000·20 cites·24 claims
- 1351US9548244B2Self-aligned contact structureIBM·Filed 2015·Granted Jan 17, 2017·0 cites·15 claims
- 1444US7015140B2Selective salicidation methodsIBM·Filed 2004·Granted Mar 21, 2006·2 cites·20 claims
- 1544US2016099158A1Method for removing metal oxideIBM·Filed 2014·Application pending·0 cites
- 1643US5815942AVapor drying system and methodTOSHIBA KK·Filed 1996·Granted Oct 6, 1998·7 cites·20 claims
- 1742US8021945B2Bottle-shaped trench capacitor with enhanced capacitanceIBM·Filed 2009·Granted Sep 20, 2011·1 cites·14 claims
- 1840US6173720B1Process for treating a semiconductor substrateIBM·Filed 1998·Granted Jan 16, 2001·7 cites·19 claims
- 1938US6508014B2Method of drying substratesIBM·Filed 2001·Granted Jan 21, 2003·0 cites·10 claims
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