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Inventor
TONG JOSE V
US
2 patents
⚠️ This page may combine multiple inventors who share the name “TONG JOSE V”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MCMILLIN BRIAN
1 patent
US8313612B2
Nov 20, 2012
Method and apparatus for reduction of voltage potential spike during dechucking
MCMILLIN BRIAN
55 citations
92
LAM RES CORP
1 patent
US8628675B2
Jan 14, 2014
Method for reduction of voltage potential spike during dechucking
LAM RES CORP
7 citations
81