Inventor
LU HUNG JEN
TW5 patents
Patents
5 patentsUS10910249B2Feb 2, 2021
Systems and methods for automated wafer handling
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations67
US11189510B2Nov 30, 2021
Adaptive inset for wafer cassette system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11183407B2Nov 23, 2021
Adaptive inset for wafer cassette system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US10535541B2Jan 14, 2020
Adaptive inset for wafer cassette system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US9892948B2Feb 13, 2018
Wafer container having damping device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations45