Inventor
LU SHIN-RUNG
TW13 patents
⚠️ This page may combine multiple inventors who share the name “LU SHIN-RUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
5 patentsUS9442392B2Sep 13, 2016
Scanner overlay correction system and method
TAIWAN SEMICONDUCTOR MFG CO LTD10 citations82
US9646896B2May 9, 2017
Lithographic overlay sampling
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations72
US9082661B2Jul 14, 2015
Scanner overlay correction system and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US9733577B2Aug 15, 2017
Intra-field process control for lithography
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48
US9588446B2Mar 7, 2017
Calibration apparatus and an adjustment method for a lithography apparatus
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations37
TAIWAN SEMICONDUCTOR MFG
4 patentsUS6943124B1Sep 13, 2005
Two step exposure to strengthen structure of polyimide or negative tone photosensitive material
TAIWAN SEMICONDUCTOR MFG24 citations90
US8889434B2Nov 18, 2014
Scanner overlay correction system and method
TAIWAN SEMICONDUCTOR MFG8 citations83
US7494928B2Feb 24, 2009
Method for patterning and etching a passivation layer
TAIWAN SEMICONDUCTOR MFG2 citations53
US7687211B2Mar 30, 2010
System and method for photolithography in semiconductor manufacturing
TAIWAN SEMICONDUCTOR MFG1 citations49