Inventor
BRIGANTE JEFFREY A
US3 patents
Patents
3 patentsUS6356653B2Mar 12, 2002
Method and apparatus for combined particle location and removal
IBM16 citations80
US6458020B1Oct 1, 2002
Slurry recirculation in chemical mechanical polishing
IBM15 citations78
US6514355B1Feb 4, 2003
Method and apparatus for recovery of semiconductor wafers from a chemical tank
IBM11 citations67