Inventor
HECK RALF
DE4 patents
Patents
4 patentsUS6719034B2Apr 13, 2004
Process for producing a tube-shaped cathode sputtering target
HERAEUS GMBH W C30 citations86
US6793784B1Sep 21, 2004
Tube target
HERAEUS GMBH W C13 citations79
US6645358B2Nov 11, 2003
Hollow cylindrical cathode sputtering target and process for producing it
HERAEUS GMBH W C14 citations79
US6756081B2Jun 29, 2004
Hollow cylindrical cathode sputtering target and process for producing it
HERAEUS GMBH W C1 citations48