Inventor

SMITS PASCAL ANTONIUS

NL3 patents

⚠️ This page may combine multiple inventors who share the name “SMITS PASCAL ANTONIUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

2 patents

US7271873B2Sep 18, 2007

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV3 citations56

US7072021B2Jul 4, 2006

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV3 citations55

DEN BOEF ARIE JEFFREY

1 patent

US8319968B2Nov 27, 2012

Imprint lithography

DEN BOEF ARIE JEFFREY6 citations71