Inventor · disambiguated record

Eizo Ohya

Also filed as: OHYA EIZO

2 granted patents·25 citations·filing 2002–2006

59Inventor score

Technology areasG03F

Files withNIKON CORP2

Top patents by PatentIndex Score

2 records

0177US6727981B2Illuminating optical apparatus and making method thereof, exposure apparatus and making method thereof, and device manufacturing methodNIKON CORP·Filed 2002·Granted Apr 27, 2004·20 cites·32 claims
0275US7889320B2Variable slit apparatus, illumination apparatus, exposure apparatus, exposure method, and device fabrication methodNIKON CORP·Filed 2006·Granted Feb 15, 2011·5 cites·34 claims

Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →