Inventor
FUSHIMI AKIHITO
JP4 patents
Patents
4 patentsUS10410902B2Sep 10, 2019
Plasma processing apparatus
TOKYO ELECTRON LTD3 citations69
US11373895B2Jun 28, 2022
Etching method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations48
US9953854B2Apr 24, 2018
Method of adsorbing target object on mounting table and plasma processing apparatus
TOKYO ELECTRON LTD0 citations48
US10141164B2Nov 27, 2018
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD0 citations39