Inventor
YE YI-LIANG
TW17 patents
Patents
17 patentsUS10332981B1Jun 25, 2019
Semiconductor device and method for fabricating the same
UNITED MICROELECTRONICS CORP5 citations82
US10796943B2Oct 6, 2020
Manufacturing method of semiconductor structure
UNITED MICROELECTRONICS CORP2 citations72
US10312084B2Jun 4, 2019
Semiconductor device and fabrication method thereof
UNITED MICROELECTRONICS CORP3 citations72
US9960084B1May 1, 2018
Method for forming semiconductor device
UNITED MICROELECTRONICS CORP3 citations72
US9793105B1Oct 17, 2017
Fabricating method of fin field effect transistor (FinFET)
UNITED MICROELECTRONICS CORP2 citations72
US9748111B2Aug 29, 2017
Method of fabricating semiconductor structure using planarization process and cleaning process
UNITED MICROELECTRONICS CORP2 citations72
US9613808B1Apr 4, 2017
Method of forming multilayer hard mask with treatment for removing impurities and forming dangling bonds
UNITED MICROELECTRONICS CORP2 citations72
US10446667B2Oct 15, 2019
Method for fabricating semiconductor device
UNITED MICROELECTRONICS CORP2 citations71
US10892348B2Jan 12, 2021
Method of rounding fin-shaped structure
UNITED MICROELECTRONICS CORP0 citations51
US10651174B2May 12, 2020
FinFET structure and fabricating method of gate structure
UNITED MICROELECTRONICS CORP0 citations51
US10622481B2Apr 14, 2020
Method of rounding corners of a fin
UNITED MICROELECTRONICS CORP0 citations51
US10340268B2Jul 2, 2019
FinFET structure and fabricating method of gate structure
UNITED MICROELECTRONICS CORP0 citations51
US9899520B2Feb 20, 2018
Method for fabricating semiconductor device
UNITED MICROELECTRONICS CORP0 citations51
US9627534B1Apr 18, 2017
Semiconductor MOS device having a dense oxide film on a spacer
UNITED MICROELECTRONICS CORP1 citations51
US9570315B2Feb 14, 2017
Method of interfacial oxide layer formation in semiconductor device
UNITED MICROELECTRONICS CORP0 citations51
US10332741B2Jun 25, 2019
Method for post chemical mechanical polishing clean
UNITED MICROELECTRONICS CORP0 citations41
US9966266B2May 8, 2018
Apparatus for semiconductor wafer treatment and semiconductor wafer treatment
UNITED MICROELECTRONICS CORP0 citations41