Inventor
CHEN KUANG-HSIU
TW28 patents
Patents
28 patentsUS11545560B2Jan 3, 2023
Semiconductor device and method for fabricating the same
UNITED MICROELECTRONICS CORP4 citations83
US9646889B1May 9, 2017
Method of removing a hard mask layer on a gate structure while forming a protective layer on the surface of a substrate
UNITED MICROELECTRONICS CORP5 citations83
US9419089B1Aug 16, 2016
Semiconductor structure and manufacturing method thereof
UNITED MICROELECTRONICS CORP7 citations83
US10943991B2Mar 9, 2021
Semiconductor device and method for fabricating the same
UNITED MICROELECTRONICS CORP4 citations81
US10312084B2Jun 4, 2019
Semiconductor device and fabrication method thereof
UNITED MICROELECTRONICS CORP3 citations72
US9960084B1May 1, 2018
Method for forming semiconductor device
UNITED MICROELECTRONICS CORP3 citations72
US9793105B1Oct 17, 2017
Fabricating method of fin field effect transistor (FinFET)
UNITED MICROELECTRONICS CORP2 citations72
US9748111B2Aug 29, 2017
Method of fabricating semiconductor structure using planarization process and cleaning process
UNITED MICROELECTRONICS CORP2 citations72
US9613808B1Apr 4, 2017
Method of forming multilayer hard mask with treatment for removing impurities and forming dangling bonds
UNITED MICROELECTRONICS CORP2 citations72
US11049971B2Jun 29, 2021
Semiconductor device having epitaxial structure
UNITED MICROELECTRONICS CORP2 citations71
US12317547B2May 27, 2025
Method of fabricating semiconductor device having epitaxial structure
UNITED MICROELECTRONICS CORP0 citations61
US11735661B2Aug 22, 2023
Method of fabricating semiconductor device having epitaxial structure
UNITED MICROELECTRONICS CORP0 citations61
US12300743B2May 13, 2025
Semiconductor device and method for fabricating the same
UNITED MICROELECTRONICS CORP0 citations60
US12021134B2Jun 25, 2024
Semiconductor device and method for fabricating the same
UNITED MICROELECTRONICS CORP0 citations60
US11195905B2Dec 7, 2021
Metal-oxide-semiconductor transistor and method of fabricating the same
UNITED MICROELECTRONICS CORP0 citations55
US10651174B2May 12, 2020
FinFET structure and fabricating method of gate structure
UNITED MICROELECTRONICS CORP0 citations51
US10505041B2Dec 10, 2019
Semiconductor device having epitaxial layer with planar surface and protrusions
UNITED MICROELECTRONICS CORP0 citations51
US10460925B2Oct 29, 2019
Method for processing semiconductor device
UNITED MICROELECTRONICS CORP0 citations51
US10340268B2Jul 2, 2019
FinFET structure and fabricating method of gate structure
UNITED MICROELECTRONICS CORP0 citations51
US10332750B2Jun 25, 2019
Method for fabricating semiconductor device with strained silicon structure
UNITED MICROELECTRONICS CORP0 citations51
US9899520B2Feb 20, 2018
Method for fabricating semiconductor device
UNITED MICROELECTRONICS CORP0 citations51
US9871113B2Jan 16, 2018
Semiconductor process
UNITED MICROELECTRONICS CORP0 citations51
US9627534B1Apr 18, 2017
Semiconductor MOS device having a dense oxide film on a spacer
UNITED MICROELECTRONICS CORP1 citations51
US9502244B2Nov 22, 2016
Manufacturing method for forming semiconductor structure
UNITED MICROELECTRONICS CORP1 citations51
US12402367B2Aug 26, 2025
Semiconductor structure and manufacturing method thereof
UNITED MICROELECTRONICS CORP0 citations50
US10700202B2Jun 30, 2020
Semiconductor device and method for forming the same
UNITED MICROELECTRONICS CORP0 citations50
US10332741B2Jun 25, 2019
Method for post chemical mechanical polishing clean
UNITED MICROELECTRONICS CORP0 citations41
US9966266B2May 8, 2018
Apparatus for semiconductor wafer treatment and semiconductor wafer treatment
UNITED MICROELECTRONICS CORP0 citations41