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Inventor
LAI CHIUKIN STEVE
US
3 patents
⚠️ This page may combine multiple inventors who share the name “LAI CHIUKIN STEVE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
2 patents
US7867789B2
Jan 11, 2011
Contact clean by remote plasma and repair of silicide surface
APPLIED MATERIALS INC
7 citations
82
US7550381B2
Jun 23, 2009
Contact clean by remote plasma and repair of silicide surface
APPLIED MATERIALS INC
12 citations
82
LU XINLIANG
1 patent
US9147578B2
Sep 29, 2015
Contact clean by remote plasma and repair of silicide surface
LU XINLIANG
0 citations
48