Inventor

YAKUNIN ANDREI MIKHAILOVICH

NL35 patents

⚠️ This page may combine multiple inventors who share the name “YAKUNIN ANDREI MIKHAILOVICH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

YAKUNIN ANDREI MIKHAILOVICH

ASML NETHERLANDS BV

Membranes for use within a lithographic apparatus and a lithographic apparatus comprising such a membrane

Pellicle for reticle and multilayer mirror

Pellicle for reticle and multilayer mirror

Graphene spectral purity filter

Source-collector device, lithographic apparatus, and device manufacturing method

Method and apparatus for generating radiation

Method and apparatus for generating radiation

Lithographic apparatus and method of manufacturing a device

Optical element, lithographic apparatus including such an optical element, device manufacturing method, and device manufactured thereby

Radiation system and lithographic apparatus

Lithographic apparatus

Lithographic system

Lithographic apparatus, spectral purity filter and device manufacturing method

Radiation source

Patterning device conditioning system and method

YAKUNIN ANDREI MIKHAILOVICH

Lithographic apparatus and method

Radiation source, lithographic apparatus, and device manufacturing method

Radiation source and lithographic apparatus

Multilayer mirror, method of producing a multilayer mirror and lithographic apparatus

Grazing incidence reflectors, lithographic apparatus, methods for manufacturing a grazing incidence reflector and methods for manufacturing a device

Spectral purity filter

Multilayer mirror and lithographic apparatus

Radiation source

WUISTER SANDER FREDERIK

Lithographic patterning process and resists to use therein

Imprint lithography

SOER WOUTER ANTHON

Spectral purity filter, lithographic apparatus, and method for manufacturing a spectral purity filter

Spectral purity filter

BANINE VADIM YEVGENYEVICH

Mirror, lithographic apparatus and device manufacturing method

Lithographic apparatus, spectral purity filter and device manufacturing method

SJMAENOK LEONID AIZIKOVITCH

Optical element comprising oriented carbon nanotube sheet and lithographic apparatus comprising such optical element

VAN SCHOOT JAN BERNARD PLECHELMUS

Radiation source

STEINHOFF JENS ARNO

Radiation source apparatus, lithographic apparatus, method of generating and delivering radiation and method for manufacturing a device

VAN HERPEN MAARTEN MARINUS JOHANNES WILHELMUS

Source module of an EUV lithographic apparatus, lithographic apparatus, and method for manufacturing a device

JAK MARTIN JACOBUS JOHAN

Spectral purity filter, radiation source, lithographic apparatus, and device manufacturing method

TIMOSHKOV VADIM IOURIEVICH

Multilayer mirror