Inventor

NIKIPELOV ANDREY

NL21 patents

⚠️ This page may combine multiple inventors who share the name “NIKIPELOV ANDREY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NIKIPELOV ANDREY

ASML NETHERLANDS BV

Method for providing a wear-resistant material on a body, and composite body

Method and apparatus for generating radiation

Membrane for EUV lithography

Radiation source-collector and method for manufacture

Transmissive diffusor

Membrane for EUV lithography

Membrane for EUV lithography

End facet protection for a radiation source and a method for use in metrology applications

Object in a lithographic apparatus

Cooling apparatus and plasma-cleaning station for cooling apparatus

Cleaning method and associated illumination source metrology apparatus

Membrane cleaning apparatus

Lithographic apparatus comprising an object with an upper layer having improved resistance to peeling off

Apparatus and method for cleaning an inspection system

Sensor mark and a method of manufacturing a sensor mark

Radiation source having debris control

Lithographic apparatus

Inspection system, lithographic apparatus, and inspection method

Lithographic apparatus

Component for use in a patterning device environment

ASML HOLDING NV

Lithographic system provided with a deflection apparatus for changing a trajectory of particulate debris