Inventor
STRUYCKEN ALEXANDER MATTHIJS
NL14 patents
⚠️ This page may combine multiple inventors who share the name “STRUYCKEN ALEXANDER MATTHIJS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
11 patentsUS7102729B2Sep 5, 2006
Lithographic apparatus, measurement system, and device manufacturing method
ASML NETHERLANDS BV158 citations93
US10712667B2Jul 14, 2020
Optical device and associated system
ASML NETHERLANDS BV22 citations91
US7462841B2Dec 9, 2008
Lithographic apparatus, device manufacturing method, and use of a radiation collector
ASML NETHERLANDS BV9 citations81
US7501642B2Mar 10, 2009
Radiation source
ASML NETHERLANDS BV7 citations73
US9986628B2May 29, 2018
Method and apparatus for generating radiation
ASML NETHERLANDS BV2 citations71
US9983482B2May 29, 2018
Radiation collector, radiation source and lithographic apparatus
ASML NETHERLANDS BV2 citations70
US7372058B2May 13, 2008
Ex-situ removal of deposition on an optical element
ASML NETHERLANDS BV8 citations70
US7602472B2Oct 13, 2009
Contamination prevention system, lithographic apparatus, radiation source, and method for manufacturing a device
ASML NETHERLANDS BV2 citations61
US7767989B2Aug 3, 2010
Ex-situ removal of deposition on an optical element
ASML NETHERLANDS BV1 citations60
US7897941B2Mar 1, 2011
Lithographic apparatus, device manufacturing method, and use of a radiation collector
ASML NETHERLANDS BV2 citations59
US10222702B2Mar 5, 2019
Radiation source
ASML NETHERLANDS BV1 citations58