Inventor

TSUNG-KUEI KANG

TW2 patents

Patents

2 patents

US6793836B2Sep 21, 2004

Puddle etching method of thin film by using spin-processor

GRAND PLASTIC TECHNOLOGY CORP21 citations85

US7115526B2Oct 3, 2006

Method for wet etching of high k thin film at low temperature

GRAND PLASTIC TECHNOLOGY CORP15 citations79