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Inventor
ADISAPUTRO IDA ARIANI
US
2 patents
Patents
2 patents
US6489248B2
Dec 3, 2002
Method and apparatus for etch passivating and etching a substrate
APPLIED MATERIALS INC
27 citations
90
US6291357B1
Sep 18, 2001
Method and apparatus for etching a substrate with reduced microloading
APPLIED MATERIALS INC
33 citations
90