Inventor

IMPONENTE GIOVANNI

NL3 patents

Patents

3 patents

US11022895B2Jun 1, 2021

Lithographic apparatus adjustment method

ASML NETHERLANDS BV0 citations54

US10678143B2Jun 9, 2020

Projection system modelling method

ASML NETHERLANDS BV0 citations32

US10620548B2Apr 14, 2020

Lithographic method and apparatus

ASML NETHERLANDS BV0 citations30