Inventor

STERN URI

IL3 patents

⚠️ This page may combine multiple inventors who share the name “STERN URI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS CARL SMT GMBH

1 patent

US11249294B2Feb 15, 2022

Optical system and method for correcting mask defects using the system

ZEISS CARL SMT GMBH0 citations48

DMITRIEV VLADIMIR

1 patent

US9606444B2Mar 28, 2017

Method and apparatus for locally deforming an optical element for photolithography

DMITRIEV VLADIMIR1 citations45

ZEISS CARL SMS LTD

1 patent

US11914289B2Feb 27, 2024

Method and apparatus for determining an effect of one or more pixels to be introduced into a substrate of a photolithographic mask

ZEISS CARL SMS LTD0 citations44