Inventor
AVOYAN ARMEN
US33 patents
⚠️ This page may combine multiple inventors who share the name “AVOYAN ARMEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
17 patentsUS7052553B1May 30, 2006
Wet cleaning of electrostatic chucks
LAM RES CORP174 citations97
US6873114B2Mar 29, 2005
Method for toolmatching and troubleshooting a plasma processing system
LAM RES CORP45 citations92
US6919689B2Jul 19, 2005
Method for toolmatching and troubleshooting a plasma processing system
LAM RES CORP16 citations84
US7942973B2May 17, 2011
Methods and apparatus for wet cleaning electrode assemblies for plasma processing apparatuses
LAM RES CORP9 citations83
US7578889B2Aug 25, 2009
Methodology for cleaning of surface metal contamination from electrode assemblies
LAM RES CORP9 citations82
US10967407B2Apr 6, 2021
Conditioning chamber component
LAM RES CORP3 citations71
US10391526B2Aug 27, 2019
Electrostatic chuck cleaning fixture
LAM RES CORP3 citations68
US8022718B2Sep 20, 2011
Method for inspecting electrostatic chucks with Kelvin probe analysis
LAM RES CORP3 citations63
US12544809B2Feb 10, 2026
Conditioning chamber component
LAM RES CORP0 citations61
US12064795B2Aug 20, 2024
Conditioning chamber component
LAM RES CORP0 citations61
US12072318B2Aug 27, 2024
Chamber component cleanliness measurement system
LAM RES CORP0 citations58
US9120201B2Sep 1, 2015
Platen and adapter assemblies for facilitating silicon electrode polishing
LAM RES CORP0 citations52
US9748078B2Aug 29, 2017
Dual phase cleaning chambers and assemblies comprising the same
LAM RES CORP0 citations51
US9406534B2Aug 2, 2016
Wet clean process for cleaning plasma processing chamber components
LAM RES CORP1 citations46
US9505036B2Nov 29, 2016
Portable sonic particle removal tool with a chemically controlled working fluid
LAM RES CORP0 citations40
US8945317B2Feb 3, 2015
System and method for cleaning gas injectors
LAM RES CORP0 citations40
US9390895B2Jul 12, 2016
Gas injector particle removal process and apparatus
LAM RES CORP0 citations39
AVOYAN ARMEN
8 patentsUS8276898B2Oct 2, 2012
Electrode transporter and fixture sets incorporating the same
AVOYAN ARMEN9 citations83
US8075701B2Dec 13, 2011
Processes for reconditioning multi-component electrodes
AVOYAN ARMEN7 citations83
US8075703B2Dec 13, 2011
Immersive oxidation and etching process for cleaning silicon electrodes
AVOYAN ARMEN4 citations62
US9293305B2Mar 22, 2016
Mixed acid cleaning assemblies
AVOYAN ARMEN2 citations61
US9396912B2Jul 19, 2016
Methods for mixed acid cleaning of showerhead electrodes
AVOYAN ARMEN1 citations51
US9245719B2Jan 26, 2016
Dual phase cleaning chambers and assemblies comprising the same
AVOYAN ARMEN0 citations51
US8550880B2Oct 8, 2013
Platen and adapter assemblies for facilitating silicon electrode polishing
AVOYAN ARMEN0 citations51
US9623449B2Apr 18, 2017
Dielectric window cleaning apparatuses
AVOYAN ARMEN0 citations39
SHIH HONG
3 patentsUS9079228B2Jul 14, 2015
Methodology for cleaning of surface metal contamination from an upper electrode used in a plasma chamber
SHIH HONG2 citations62
US8215321B2Jul 10, 2012
Methods and apparatus for wet cleaning electrode assemblies for plasma processing apparatuses
SHIH HONG3 citations61
US8545639B2Oct 1, 2013
Method of cleaning aluminum plasma chamber parts
SHIH HONG1 citations51