Inventor
LACROIX CLIFF
US6 patents
⚠️ This page may combine multiple inventors who share the name “LACROIX CLIFF”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
5 patentsUS9105676B2Aug 11, 2015
Method of removing damaged epoxy from electrostatic chuck
LAM RES CORP5 citations70
US10391526B2Aug 27, 2019
Electrostatic chuck cleaning fixture
LAM RES CORP3 citations68
US9505036B2Nov 29, 2016
Portable sonic particle removal tool with a chemically controlled working fluid
LAM RES CORP0 citations40
US9393666B2Jul 19, 2016
Adapter plate for polishing and cleaning electrodes
LAM RES CORP0 citations40
US9390895B2Jul 12, 2016
Gas injector particle removal process and apparatus
LAM RES CORP0 citations39