Inventor
TAKEI JUNICHI
JP6 patents
⚠️ This page may combine multiple inventors who share the name “TAKEI JUNICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
5 patentsUS10392688B2Aug 27, 2019
Film forming apparatus
TOKYO ELECTRON LTD4 citations71
US11149342B2Oct 19, 2021
Sputtering apparatus
TOKYO ELECTRON LTD0 citations59
US11410837B2Aug 9, 2022
Film-forming device
TOKYO ELECTRON LTD0 citations50
US11414747B2Aug 16, 2022
Sputtering device
TOKYO ELECTRON LTD0 citations49
US12354856B2Jul 8, 2025
Film forming apparatus
TOKYO ELECTRON LTD0 citations46