Inventor · disambiguated record
Lih-Shyng Tsai
Also filed as: TSAI LIH-SHYNG
4 granted patents·133 citations·filing 1991–1994
80Inventor score
Files withTAIWAN SEMICONDUCTOR MFG4
Top patents by PatentIndex Score
4 records- 0185US5252515AMethod for field inversion free multiple layer metallurgy VLSI processingTAIWAN SEMICONDUCTOR MFG·Filed 1991·Granted Oct 12, 1993·61 cites·20 claims
- 0275US5286667AModified and robust self-aligning contact processTAIWAN SEMICONDUCTOR MFG·Filed 1992·Granted Feb 15, 1994·44 cites·13 claims
- 0354US5461254AMethod and resulting device for field inversion free multiple layer metallurgy VLSI processingTAIWAN SEMICONDUCTOR MFG·Filed 1994·Granted Oct 24, 1995·14 cites·16 claims
- 0439US5248384ARapid thermal treatment to eliminate metal void formation in VLSI manufacturing processTAIWAN SEMICONDUCTOR MFG·Filed 1991·Granted Sep 28, 1993·14 cites·19 claims
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