Inventor
MIURA STEVE S
US3 patents
Patents
3 patentsUS5338818AAug 16, 1994
Silicon containing positive resist for DUV lithography
IBM44 citations91
US5240812AAug 31, 1993
Top coat for acid catalyzed resists
IBM35 citations90
US5362599ANov 8, 1994
Fast diazoquinone positive resists comprising mixed esters of 4-sulfonate and 5-sulfonate compounds
IBM13 citations72