P

Inventor

SAKANO YOSHIKAZU

JP5 patents
⚠️ This page may combine multiple inventors who share the name “SAKANO YOSHIKAZU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NIPPON DENSO CO

3 patents
US5423941AJun 13, 1995

Dry etching process for semiconductor

NIPPON DENSO CO86 citations94
US5871659AFeb 16, 1999

Dry etching process for semiconductor

NIPPON DENSO CO31 citations92
US5522966AJun 4, 1996

Dry etching process for semiconductor

NIPPON DENSO CO38 citations90

DENSO CORP

2 patents
US6521538B2Feb 18, 2003

Method of forming a trench with a rounded bottom in a semiconductor device

DENSO CORP127 citations97
US6090718AJul 18, 2000

Dry etching method for semiconductor substrate

DENSO CORP96 citations97