Inventor
KOMIYA TARO
JP2 patents
Patents
2 patentsUS6436193B1Aug 20, 2002
Gas processing apparatus baffle member, and gas processing method
TOKYO ELECTRON LTD262 citations97
US7648610B2Jan 19, 2010
Baffle plate, apparatus for producing the same, method of producing the same, and gas processing apparatus containing baffle plate
TOKYO ELECTRON LTD42 citations91