Inventor
OTT ANDREW
US6 patents
⚠️ This page may combine multiple inventors who share the name “OTT ANDREW”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INTEL CORP
4 patentsUS7214594B2May 8, 2007
Method of making semiconductor device using a novel interconnect cladding layer
INTEL CORP19 citations92
US6992391B2Jan 31, 2006
Dual-damascene interconnects without an etch stop layer by alternating ILDs
INTEL CORP12 citations83
US7164206B2Jan 16, 2007
Structure in a microelectronic device including a bi-layer for a diffusion barrier and an etch-stop layer
INTEL CORP8 citations70
US6645877B2Nov 11, 2003
Method of operating a processing chamber having multiple stations
INTEL CORP0 citations46
OTT ANDREW
2 patentsUS8120114B2Feb 21, 2012
Transistor having an etch stop layer including a metal compound that is selectively formed over a metal gate
OTT ANDREW13 citations81
US8399317B2Mar 19, 2013
Transistor having an etch stop layer including a metal compound that is selectively formed over a metal gate, and method therefor
OTT ANDREW3 citations59