Inventor
ATNIP EARL VEDERE
US3 patents
Patents
3 patentsUS11511989B2Nov 29, 2022
MEMS via with enhanced electrical and mechanical integrity
TEXAS INSTRUMENTS INC0 citations46
US9656860B2May 23, 2017
Use of metal native oxide to control stress gradient and bending moment of a released MEMS structure
TEXAS INSTRUMENTS INC0 citations43
US9446947B2Sep 20, 2016
Use of metal native oxide to control stress gradient and bending moment of a released MEMS structure
TEXAS INSTRUMENTS INC0 citations43