Inventor
BARRETO RAUL ENRIQUE
US2 patents
Patents
2 patentsUS9656860B2May 23, 2017
Use of metal native oxide to control stress gradient and bending moment of a released MEMS structure
TEXAS INSTRUMENTS INC0 citations43
US9446947B2Sep 20, 2016
Use of metal native oxide to control stress gradient and bending moment of a released MEMS structure
TEXAS INSTRUMENTS INC0 citations43