Inventor
KODAMA SHOICHI
JP12 patents
⚠️ This page may combine multiple inventors who share the name “KODAMA SHOICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
7 patentsUS5679059AOct 21, 1997
Polishing aparatus and method
EBARA CORP110 citations98
US5704827AJan 6, 1998
Polishing apparatus including cloth cartridge connected to turntable
EBARA CORP67 citations95
US6500051B1Dec 31, 2002
Polishing apparatus and method
EBARA CORP25 citations92
US6413154B1Jul 2, 2002
Polishing apparatus
EBARA CORP25 citations92
US6221171B1Apr 24, 2001
Method and apparatus for conveying a workpiece
EBARA CORP11 citations73
US6595220B2Jul 22, 2003
Apparatus for conveying a workpiece
EBARA CORP3 citations62
US7708618B2May 4, 2010
Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor device
EBARA CORP0 citations50
TOSHIBA KK
4 patentsUS5827110AOct 27, 1998
Polishing facility
TOSHIBA KK64 citations94
US5180273AJan 19, 1993
Apparatus for transferring semiconductor wafers
TOSHIBA KK477 citations94
US6997782B2Feb 14, 2006
Polishing apparatus and a method of polishing and cleaning and drying a wafer
TOSHIBA KK16 citations92
US7198552B2Apr 3, 2007
Polishing apparatus
TOSHIBA KK2 citations62