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Inventor
YOENG TAN SOON
SG
2 patents
Patents
2 patents
US9673111B2
Jun 6, 2017
Methods for extreme ultraviolet mask defect mitigation by multi-patterning
GLOBALFOUNDRIES SG PTE LTD
0 citations
43
US9257277B2
Feb 9, 2016
Methods for extreme ultraviolet mask defect mitigation by multi-patterning
GLOBALFOUNDRIES SG PTE LTD
0 citations
43