Inventor

CHAN SEE ARK

3 patents

Patents

3 patents

US4106975AAug 15, 1978

Process for etching holes

IBM26 citations79

US4123571AOct 31, 1978

Method for forming smooth self limiting and pin hole free SiC films on Si

IBM25 citations77

US4011060AMar 8, 1977

Method of controlling the softening point of solder glass

IBM6 citations58