Inventor
NEVIN C SCOTT
US3 patents
Patents
3 patentsUS4890933AJan 2, 1990
Transmission method to determine and control the temperature of wafers or thin layers with special application to semiconductors
ITT39 citations89
US5170041ADec 8, 1992
Transmission method to determine and control the temperature of wafers or thin layers with special application to semiconductors
ITT17 citations71
US5167452ADec 1, 1992
Transmission method to determine and control the temperature of wafers or thin layers with special application to semiconductors
ITT15 citations71