Inventor

CHIZHOV ILYA

US2 patents

Patents

2 patents

US6747746B2Jun 8, 2004

System and method for finding the center of rotation of an R-theta stage

THERMA WAVE INC18 citations79

US7030984B2Apr 18, 2006

Fast wafer positioning method for optical metrology

THERMA WAVE INC2 citations58