Inventor
MITSUYA TAKASHI
JP15 patents
⚠️ This page may combine multiple inventors who share the name “MITSUYA TAKASHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
11 patentsUS8025759B2Sep 27, 2011
Polishing apparatus and polishing method
EBARA CORP12 citations81
US11098414B2Aug 24, 2021
Plating system, a plating system control method, and a storage medium containing a program for causing a computer to execute the plating system control method
EBARA CORP0 citations61
US11177147B2Nov 16, 2021
Substrate treatment apparatus, controller of substrate treatment apparatus, method for controlling substrate treatment apparatus, and memory medium storing program
EBARA CORP1 citations60
US11911868B2Feb 27, 2024
Substrate processing apparatus, substrate processing method, and storage medium that stores program to cause computer in substrate processing apparatus to execute substrate processing method
EBARA CORP0 citations59
US11099546B2Aug 24, 2021
Scheduler, substrate processing apparatus, and substrate conveyance method
EBARA CORP0 citations58
US10824135B2Nov 3, 2020
Scheduler, substrate processing apparatus, and substrate conveyance method
EBARA CORP1 citations58
US10501862B2Dec 10, 2019
Plating system, a plating system control method, and a storage medium containing a program for causing a computer to execute the plating system control method
EBARA CORP0 citations51
US10141211B2Nov 27, 2018
Substrate processing apparatus and substrate transfer method
EBARA CORP0 citations51
US9786532B2Oct 10, 2017
Substrate processing apparatus and method of transferring a substrate
EBARA CORP0 citations51
US12237194B2Feb 25, 2025
Substrate transporter and substrate processing apparatus including substrate transporter
EBARA CORP0 citations49
US10824138B2Nov 3, 2020
Scheduler, substrate processing apparatus, and substrate conveyance method
EBARA CORP0 citations37