Inventor
KOIZUMI RYUYA
JP18 patents
⚠️ This page may combine multiple inventors who share the name “KOIZUMI RYUYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
17 patentsUS11315812B2Apr 26, 2022
Semiconductor manufacturing apparatus, failure prediction method for semiconductor manufacturing apparatus, and failure prediction program for semiconductor manufacturing apparatus
EBARA CORP5 citations71
US12221714B2Feb 11, 2025
Plating method and plating apparatus
EBARA CORP0 citations62
US11286577B2Mar 29, 2022
Plating method and plating apparatus
EBARA CORP0 citations62
US11098414B2Aug 24, 2021
Plating system, a plating system control method, and a storage medium containing a program for causing a computer to execute the plating system control method
EBARA CORP0 citations61
US12191178B2Jan 7, 2025
Semiconductor manufacturing apparatus, failure prediction method for semiconductor manufacturing apparatus, and failure prediction program for semiconductor manufacturing apparatus
EBARA CORP0 citations60
US11099546B2Aug 24, 2021
Scheduler, substrate processing apparatus, and substrate conveyance method
EBARA CORP0 citations58
US10824135B2Nov 3, 2020
Scheduler, substrate processing apparatus, and substrate conveyance method
EBARA CORP1 citations58
US11461647B2Oct 4, 2022
Method of constructing prediction model that predicts number of plateable substrates, method of constructing selection model for predicting component that causes failure, and method of predicting number of plateable substrates
EBARA CORP0 citations51
US10648099B2May 12, 2020
Plating method and plating apparatus
EBARA CORP0 citations51
US10501862B2Dec 10, 2019
Plating system, a plating system control method, and a storage medium containing a program for causing a computer to execute the plating system control method
EBARA CORP0 citations51
US12271813B2Apr 8, 2025
Method for determining optimal number of submodules for use in semiconductor manufacturing apparatus including substrate processing module including plurality of submodules, and semiconductor manufacturing apparatus
EBARA CORP0 citations50
US10818527B2Oct 27, 2020
Substrate holding member, substrate processing device, method for controlling substrate processing device, and storage medium storing programs
EBARA CORP0 citations50
US10077504B2Sep 18, 2018
Plating apparatus
EBARA CORP0 citations50
US9624594B2Apr 18, 2017
Plating apparatus
EBARA CORP1 citations50
US12054841B2Aug 6, 2024
Apparatus for plating and method of plating
EBARA CORP0 citations44
US10824138B2Nov 3, 2020
Scheduler, substrate processing apparatus, and substrate conveyance method
EBARA CORP0 citations37
US10446422B2Oct 15, 2019
Method of controlling display of operation of semiconductor manufacturing apparatus and non-transitory computer readable storage medium therefor, and system for performing display concerning operation of semiconductor manufacturing apparatus
EBARA CORP0 citations35