Inventor
OISHI KUNIO
JP15 patents
⚠️ This page may combine multiple inventors who share the name “OISHI KUNIO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
9 patentsUS12036634B2Jul 16, 2024
Substrate processing control system, substrate processing control method, and program
EBARA CORP1 citations62
US7767472B2Aug 3, 2010
Substrate processing method and substrate processing apparatus
EBARA CORP2 citations62
US11098414B2Aug 24, 2021
Plating system, a plating system control method, and a storage medium containing a program for causing a computer to execute the plating system control method
EBARA CORP0 citations61
US11099546B2Aug 24, 2021
Scheduler, substrate processing apparatus, and substrate conveyance method
EBARA CORP0 citations58
US10824135B2Nov 3, 2020
Scheduler, substrate processing apparatus, and substrate conveyance method
EBARA CORP1 citations58
US11461647B2Oct 4, 2022
Method of constructing prediction model that predicts number of plateable substrates, method of constructing selection model for predicting component that causes failure, and method of predicting number of plateable substrates
EBARA CORP0 citations51
US11436392B2Sep 6, 2022
Substrate processing apparatus and storage medium having program stored therein
EBARA CORP0 citations51
US10501862B2Dec 10, 2019
Plating system, a plating system control method, and a storage medium containing a program for causing a computer to execute the plating system control method
EBARA CORP0 citations51
US10824138B2Nov 3, 2020
Scheduler, substrate processing apparatus, and substrate conveyance method
EBARA CORP0 citations37