Inventor
KIM IN-SUNG
KR20 patents
⚠️ This page may combine multiple inventors who share the name “KIM IN-SUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
12 patentsUS7022438B2Apr 4, 2006
Photomask for forming small contact hole array and methods of fabricating and using the same
SAMSUNG ELECTRONICS CO LTD12 citations83
US6893779B2May 17, 2005
Phase shifting mask for manufacturing semiconductor device and method of fabricating the same
SAMSUNG ELECTRONICS CO LTD13 citations83
US6716746B1Apr 6, 2004
Semiconductor device having self-aligned contact and method of fabricating the same
SAMSUNG ELECTRONICS CO LTD16 citations83
US7361433B2Apr 22, 2008
Photomask for forming photoresist patterns repeating in two dimensions and method of fabricating the same
SAMSUNG ELECTRONICS CO LTD9 citations82
US7475383B2Jan 6, 2009
Method of fabricating photo mask
SAMSUNG ELECTRONICS CO LTD16 citations81
US7384711B2Jun 10, 2008
Stencil mask having main and auxiliary strut and method of forming the same
SAMSUNG ELECTRONICS CO LTD5 citations72
US7300746B2Nov 27, 2007
Photomask for forming small contact hole array and methods of fabricating and using the same
SAMSUNG ELECTRONICS CO LTD2 citations62
US6492701B1Dec 10, 2002
Semiconductor device having anti-reflective cap and spacer, method of manufacturing the same, and method of manufacturing photoresist pattern using the same
SAMSUNG ELECTRONICS CO LTD5 citations62
US9658522B2May 23, 2017
Reflective extreme ultraviolet mask
SAMSUNG ELECTRONICS CO LTD0 citations52
US7635547B2Dec 22, 2009
Stencil mask having main and auxiliary strut and method of forming the same
SAMSUNG ELECTRONICS CO LTD0 citations51
US7473497B2Jan 6, 2009
Phase shifting mask for manufacturing semiconductor device and method of fabricating the same
SAMSUNG ELECTRONICS CO LTD0 citations51
US9791788B2Oct 17, 2017
Method of manufacturing a semiconductor device
SAMSUNG ELECTRONICS CO LTD0 citations41