Inventor
MABOUDIAN ROYA
US4 patents
Patents
4 patentsUS6114044ASep 5, 2000
Method of drying passivated micromachines by dewetting from a liquid-based process
UNIV CALIFORNIA46 citations90
US7151277B2Dec 19, 2006
Selective etching of silicon carbide films
UNIV CALIFORNIA11 citations82
US8043943B2Oct 25, 2011
Low-temperature formation of polycrystalline semiconductor films via enhanced metal-induced crystallization
UNIV CALIFORNIA10 citations79
US10845325B2Nov 24, 2020
In-situ localized growth of porous metal oxide films on microheater platform for low temperature gas detection
UNIV CALIFORNIA4 citations67