Inventor
JANSSEN PAUL
NL37 patents
⚠️ This page may combine multiple inventors who share the name “JANSSEN PAUL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
30 patentsUS10539886B2Jan 21, 2020
Pellicle attachment apparatus
ASML NETHERLANDS BV13 citations90
US10983431B2Apr 20, 2021
Pellicle and pellicle assembly
ASML NETHERLANDS BV5 citations83
US10466585B2Nov 5, 2019
Pellicle and pellicle assembly
ASML NETHERLANDS BV4 citations83
US10571800B2Feb 25, 2020
Mask assembly and associated methods
ASML NETHERLANDS BV9 citations82
US10558129B2Feb 11, 2020
Mask assembly
ASML NETHERLANDS BV7 citations82
US10241418B2Mar 26, 2019
Method and apparatus for obtaining diagnostic information relating to a lithographic manufacturing process, lithographic processing system including diagnostic apparatus
ASML NETHERLANDS BV9 citations80
US11320731B2May 3, 2022
Membrane for EUV lithography
ASML NETHERLANDS BV3 citations72
US11635681B2Apr 25, 2023
Mask assembly and associated methods
ASML NETHERLANDS BV1 citations71
US11029595B2Jun 8, 2021
Mask assembly and associated methods
ASML NETHERLANDS BV1 citations71
US11231646B2Jan 25, 2022
Pellicle and pellicle assembly
ASML NETHERLANDS BV1 citations70
US10908496B2Feb 2, 2021
Membrane for EUV lithography
ASML NETHERLANDS BV3 citations70
US10712656B2Jul 14, 2020
Method for manufacturing a membrane assembly
ASML NETHERLANDS BV4 citations70
US11086213B2Aug 10, 2021
Mask assembly and associated methods
ASML NETHERLANDS BV1 citations69
US10613445B2Apr 7, 2020
Methods and apparatus for obtaining diagnostic information relating to a lithographic manufacturing process
ASML NETHERLANDS BV3 citations69
US12066758B2Aug 20, 2024
Pellicle and pellicle assembly
ASML NETHERLANDS BV0 citations62
US11347142B2May 31, 2022
Pellicle and pellicle assembly
ASML NETHERLANDS BV0 citations62
US11036128B2Jun 15, 2021
Membrane assembly
ASML NETHERLANDS BV0 citations61
US10928722B2Feb 23, 2021
Method of manufacturing a membrane assembly for EUV lithography, a membrane assembly, a lithographic apparatus, and a device manufacturing method
ASML NETHERLANDS BV1 citations61
US12474629B2Nov 18, 2025
Membrane for EUV lithography
ASML NETHERLANDS BV0 citations60
US11762281B2Sep 19, 2023
Membrane for EUV lithography
ASML NETHERLANDS BV0 citations60
US11009803B2May 18, 2021
Mask assembly
ASML NETHERLANDS BV0 citations60
US12117726B2Oct 15, 2024
Pellicle and pellicle assembly
ASML NETHERLANDS BV0 citations59
US11754918B2Sep 12, 2023
Pellicle and pellicle assembly
ASML NETHERLANDS BV0 citations59
US11003098B2May 11, 2021
Pellicle attachment apparatus
ASML NETHERLANDS BV0 citations59
US10969701B2Apr 6, 2021
Pellicle attachment apparatus
ASML NETHERLANDS BV0 citations59
US10852633B2Dec 1, 2020
Method for manufacturing a membrane assembly
ASML NETHERLANDS BV1 citations58
US12001135B2Jun 4, 2024
Method of manufacturing a membrane assembly
ASML NETHERLANDS BV0 citations56
US11977326B2May 7, 2024
Pellicle for EUV lithography
ASML NETHERLANDS BV0 citations56
US12436454B2Oct 7, 2025
Pellicle membrane
ASML NETHERLANDS BV0 citations53
US9740113B2Aug 22, 2017
Lithographic apparatus, device manufacturing method and method of clamping an object
ASML NETHERLANDS BV0 citations48