Inventor
VERBRUGGE BEATRIJS LOUISE MARIE-JOSEPH KATRIEN
BE11 patents
Patents
11 patentsUS10539886B2Jan 21, 2020
Pellicle attachment apparatus
ASML NETHERLANDS BV13 citations90
US10571800B2Feb 25, 2020
Mask assembly and associated methods
ASML NETHERLANDS BV9 citations82
US10558129B2Feb 11, 2020
Mask assembly
ASML NETHERLANDS BV7 citations82
US11635681B2Apr 25, 2023
Mask assembly and associated methods
ASML NETHERLANDS BV1 citations71
US11029595B2Jun 8, 2021
Mask assembly and associated methods
ASML NETHERLANDS BV1 citations71
US10712656B2Jul 14, 2020
Method for manufacturing a membrane assembly
ASML NETHERLANDS BV4 citations70
US11086213B2Aug 10, 2021
Mask assembly and associated methods
ASML NETHERLANDS BV1 citations69
US11009803B2May 18, 2021
Mask assembly
ASML NETHERLANDS BV0 citations60
US11003098B2May 11, 2021
Pellicle attachment apparatus
ASML NETHERLANDS BV0 citations59
US10969701B2Apr 6, 2021
Pellicle attachment apparatus
ASML NETHERLANDS BV0 citations59
US10852633B2Dec 1, 2020
Method for manufacturing a membrane assembly
ASML NETHERLANDS BV1 citations58