Inventor

YANG YU-SIN

KR66 patents

⚠️ This page may combine multiple inventors who share the name “YANG YU-SIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

YANG YU-SIN

SAMSUNG ELECTRONICS CO LTD

Method of monitoring contact hole of integrated circuit using corona charges

Method of inspecting a leakage current characteristic of a dielectric layer and apparatus for performing the method

Inspecting apparatus based on hyperspectral imaging

Image creating method and imaging system for performing the same

Method of forming a three-dimensional image of a pattern to be inspected and apparatus for performing the same

Scanning electron microscope system capable of measuring in-cell overlay offset using high-energy electron beam and method thereof

Broadband light source and optical inspector having the same

Spectral ellipsometry measurement and data analysis device and related systems and methods

Method of inspecting wafer

Chemical-mechanical polishing apparatus and method for controlling the same

Method of inspecting surface and method of manufacturing semiconductor device

Broadband light illuminators

Surface inspecting method

Method for inspecting a polishing pad in a semiconductor manufacturing process, an apparatus for performing the method, and a polishing device adopting the apparatus

Method of inspecting wafer using electron beam

Method of inspecting semiconductor device

Method of detecting defects of patterns on a semiconductor substrate and apparatus for performing the same

Method of analyzing a wafer sample

Wafer inspecting method

Method and apparatus for inspecting target defects on a wafer

Method and apparatus for inspecting a substrate

Method of inspecting pattern defect

Methods of fabricating microelectronic substrate inspection equipment

Method for detecting defects in a substrate having a semiconductor device thereon

Apparatus and method to inspect defect of semiconductor device

Method and apparatus for inspecting defects in multiple regions with different parameters

Method and apparatus for inspecting a wafer surface

Method and apparatus for inspecting defects

Method of inspecting surface and method of manufacturing semiconductor device

Apparatus and method for inspecting a surface of a wafer

Method of classifying defects

Method for inspection of defects on a substrate

Method of inspecting for defects and apparatus for performing the method

Method and apparatus for inspecting substrate pattern

Method and apparatus for measuring contamination of a semiconductor substrate

Methods of manufacturing semiconductor device

Defect inspection method and defect inspection apparatus

Method for measuring step difference in a semiconductor device and apparatus for performing the same

Conductive atomic force microscope and method of operating the same

Method of measuring a surface voltage of an insulating layer

Method and apparatus for detecting a photolithography processing error, and method and apparatus for monitoring a photolithography process

Method and apparatus to measure step height of device using scanning electron microscope

Method and apparatus for numerically analyzing grain growth on semiconductor wafer using SEM image

Reflector structure of illumination optic system

YANG YU-SIN

Method of detecting defects in patterns on semiconductor substrate by comparing second image with reference image after acquiring second image from first image and apparatus for performing the same

Method of detecting a defect on an object

YUN SEONG-JIN

Overlay measuring method and system, and method of manufacturing semiconductor device using the same

SAMSUNG ELECTRIC

Method and apparatus for detecting contaminants in ion-implanted wafer

SOHN YOUNG-HOON

Methods of generating three-dimensional process window qualification

KIM MIN-KOOK

Microelectronic substrate inspection equipment using helium ion microscopy