Inventor
KAWAGUCHI MICHIHIRO
JP12 patents
⚠️ This page may combine multiple inventors who share the name “KAWAGUCHI MICHIHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NUFLARE TECHNOLOGY INC
9 patentsUS9299531B2Mar 29, 2016
Mask cover, charged particle beam drawing apparatus and charged particle beam drawing method
NUFLARE TECHNOLOGY INC7 citations77
US8847178B2Sep 30, 2014
Charged particle beam writing apparatus and charged particle beam writing method
NUFLARE TECHNOLOGY INC4 citations71
US10373793B2Aug 6, 2019
Conductive contact point pin and charged particle beam apparatus
NUFLARE TECHNOLOGY INC2 citations70
US12142512B2Nov 12, 2024
Vacuum apparatus
NUFLARE TECHNOLOGY INC0 citations50
US11049688B2Jun 29, 2021
Charged particle beam irradiation apparatus
NUFLARE TECHNOLOGY INC0 citations49
US8987683B2Mar 24, 2015
Charged particle beam drawing apparatus and charged particle beam drawing method
NUFLARE TECHNOLOGY INC1 citations48
US10129985B2Nov 13, 2018
Substrate cover
NUFLARE TECHNOLOGY INC0 citations39
US10607810B2Mar 31, 2020
Vibration control system and optical equipment equipped therewith
NUFLARE TECHNOLOGY INC0 citations37
US8912513B2Dec 16, 2014
Charged particle beam writing apparatus and charged particle beam writing method
NUFLARE TECHNOLOGY INC0 citations33